JPH0180929U - - Google Patents
Info
- Publication number
- JPH0180929U JPH0180929U JP1987176357U JP17635787U JPH0180929U JP H0180929 U JPH0180929 U JP H0180929U JP 1987176357 U JP1987176357 U JP 1987176357U JP 17635787 U JP17635787 U JP 17635787U JP H0180929 U JPH0180929 U JP H0180929U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cleaning device
- chuck
- support plate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176357U JPH0180929U (en]) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176357U JPH0180929U (en]) | 1987-11-20 | 1987-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180929U true JPH0180929U (en]) | 1989-05-30 |
Family
ID=31468098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176357U Pending JPH0180929U (en]) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180929U (en]) |
-
1987
- 1987-11-20 JP JP1987176357U patent/JPH0180929U/ja active Pending